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Proceedings Paper

Phase analysis error reduction in the Fourier transform method using a virtual interferogram
Author(s): H. Toba; Z. Liu; S. Udagawa; N. Fujiwara; S. Nakayama; T. Gemma; M. Takeda
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Paper Abstract

We propose a new method for reducing ripple phase errors in the fringe analysis by the Fourier transform method. Object profiles obtained by the conventional Fourier transform method tend to have ripple errors at the boundary edges of the fringe pattern. The shape of these ripple phase errors are found to have certain systematic relations to low order components of the phase and intensity distributions, which can be modeled by polynomials (such as Zernike polynomials). We estimate the systematic ripple errors by analyzing a virtual interferogram which is numerically created with models of the intensity and the phase. Starting from a rough initial guess, the virtual interferogram is sequentially improved by an iterative algorithm. Results of simulations and experiments that demonstrate the validity of the proposed method are presented.

Paper Details

Date Published: 17 June 2009
PDF: 9 pages
Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738910 (17 June 2009); doi: 10.1117/12.825200
Show Author Affiliations
H. Toba, Nikon Corp. (Japan)
Z. Liu, Nikon Corp. (Japan)
S. Udagawa, Nikon Corp. (Japan)
N. Fujiwara, Nikon Corp. (Japan)
S. Nakayama, Nikon Corp. (Japan)
T. Gemma, Nikon Corp. (Japan)
M. Takeda, Univ. of Electro-Communications (Japan)

Published in SPIE Proceedings Vol. 7389:
Optical Measurement Systems for Industrial Inspection VI
Peter H. Lehmann, Editor(s)

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