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Proceedings Paper

Interferometric imaging ellipsometry: fundamental study
Author(s): Seichi Sato; Shigeru Ando
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Paper Abstract

A new type of spectroscopic ellipsometry is proposed for imaging optical properties of non-uniform thin films. Unlike conventional spectroscopic ellipsometers, the ellipsometer is neither based on a monochromator nor a spectrometer. By using broad-band light source and white-light interference technique, the ellipsometry system efficiently illuminates the sample and enables us to detect reflected light with a CCD or CMOS image sensor. Therefore fast imaging ellipsometry is realized over wide spectral range. In this study, we built simple imaging ellipsometer based on P-S-A (polarizer-sample-analyzer) configuration and show fundamental experimental results.

Paper Details

Date Published: 21 August 2009
PDF: 9 pages
Proc. SPIE 7405, Instrumentation, Metrology, and Standards for Nanomanufacturing III, 74050F (21 August 2009); doi: 10.1117/12.825198
Show Author Affiliations
Seichi Sato, The Univ. of Tokyo (Japan)
Shigeru Ando, The Univ. of Tokyo (Japan)


Published in SPIE Proceedings Vol. 7405:
Instrumentation, Metrology, and Standards for Nanomanufacturing III
Michael T. Postek; John A. Allgair, Editor(s)

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