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Proceedings Paper

High-speed and precision auto-focusing system for direct laser lithography
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Paper Abstract

The auto-focusing is one of the important parts in the automated vision inspection or measurement using optical microscopes. Moreover, laser micromachining or laser lithography requires a high speed and precision auto-focusing. In this paper, we propose and realize an auto-focusing system using two cylindrical lenses, which is the enhanced version of the previous astigmatism method. It shows very good performances, especially very high speed and the largest defocusing range in comparison with the previous astigmatic methods. The performance of our auto-focusing system was evaluated by tracing the linear stage whose position was monitored by a commercial laser interferometer.

Paper Details

Date Published: 21 August 2009
PDF: 6 pages
Proc. SPIE 7426, Optical Manufacturing and Testing VIII, 742610 (21 August 2009); doi: 10.1117/12.825191
Show Author Affiliations
Dong-Ik Kim, Korea Basic Science Institute (Korea, Republic of)
Hyug-Gyo Rhee, Korea Research Institute of Standards and Science (Korea, Republic of)
Jae-Bong Song, Korea Research Institute of Standards and Science (Korea, Republic of)
Yun-Woo Lee, Korea Research Institute of Standards and Science (Korea, Republic of)


Published in SPIE Proceedings Vol. 7426:
Optical Manufacturing and Testing VIII
James H. Burge; Oliver W. Fähnle; Ray Williamson, Editor(s)

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