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Proceedings Paper

Interfacial strength of silicon nitride films measured by blister test
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Proc. SPIE 7404, Nanostructured Thin Films II, 74040O; doi: 10.1117/12.825050
Show Author Affiliations
Bong-Bu Jung, Pohang Univ. of Science and Technology (Korea, Republic of)
Hun-Kee Lee, Pohang Univ. of Science and Technology (Korea, Republic of)
Hyun-Chul Park, Pohang Univ. of Science and Technology (Korea, Republic of)


Published in SPIE Proceedings Vol. 7404:
Nanostructured Thin Films II
Geoffrey B. Smith; Akhlesh Lakhtakia; Cheng-Chung Lee, Editor(s)

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