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Proceedings Paper

Infiltration of individual pores in macroporous silicon photonic crystals
Author(s): Peter W. Nolte; Daniel Pergande; Stefan L. Schweizer; Markus Geuss; Roland Salzer; Brian Makowski; Martin Steinhart; Ralf B. Wehrspohn; Christoph Weder
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Paper Abstract

A new and promising approach for the design and fabrication of novel optical devices is the functionalization of individual pores in 2D photonic crystals (PhC). This can be done by infiltrating the pores with polymers or dyes. We present a method to locally infiltrate individual pores. This new technique enables the fabrication of a new class of devices, such as optical switches or multiplexers. For the infiltration of individual pores 2D PhC templates made of macroporous silicon were used. Local addressing of the pores is carried out by using focused ion beam technology. For the infiltration itself the wetting assisted templating process is applied. We will present experimentally the infiltration of different polymers and different optical designs.

Paper Details

Date Published: 1 September 2009
PDF: 5 pages
Proc. SPIE 7393, Nanophotonic Materials VI, 73930S (1 September 2009); doi: 10.1117/12.824862
Show Author Affiliations
Peter W. Nolte, Martin-Luther Univ. Halle-Wittenberg (Germany)
Daniel Pergande, Martin-Luther Univ. Halle-Wittenberg (Germany)
Stefan L. Schweizer, Martin-Luther Univ. Halle-Wittenberg (Germany)
Markus Geuss, Max Planck Institute of Microstructure Physics (Germany)
Roland Salzer, Fraunhofer Institute for Mechanics of Materials (Germany)
Brian Makowski, Case Western Reserve Univ. (United States)
Martin Steinhart, Max Planck Institute of Microstructure Physics (Germany)
Ralf B. Wehrspohn, Martin-Luther Univ. Halle-Wittenberg (Germany)
Fraunhofer Institute for Mechanics of Materials (Germany)
Christoph Weder, Case Western Reserve Univ. (United States)

Published in SPIE Proceedings Vol. 7393:
Nanophotonic Materials VI
Stefano Cabrini; Taleb Mokari, Editor(s)

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