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Proceedings Paper

Depth-graded Co/C multilayers prepared by reactive sputtering
Author(s): Jeffrey A. Bellotti; David L. Windt
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Paper Abstract

We have used reactive sputtering with nitrogen to deposit both periodic and depth-graded Co/C X-ray multilayers intended for use at grazing incidence for astronomical applications. In comparison to Co/C films deposited nonreactively, reactively-sputtered films show lower stress and lower roughness. Consequently we have been able to fabricate Co/C multilayers that have much smaller periods relative to what can be achieved using non-reactive sputtering. We have thus far produced several prototype Co/C multilayers, including a depth-graded film containing 500 bilayers for use below 10 keV, and a depth-graded film containing 1100 bilayers for use up to 100 keV. Both of these films show excellent X-ray performance, low film stress, and excellent temporal stability.

Paper Details

Date Published: 31 August 2009
PDF: 7 pages
Proc. SPIE 7437, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV, 743715 (31 August 2009); doi: 10.1117/12.824628
Show Author Affiliations
Jeffrey A. Bellotti, Reflective X-Ray Optics LLC (United States)
David L. Windt, Reflective X-Ray Optics LLC (United States)


Published in SPIE Proceedings Vol. 7437:
Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV
Stephen L. O'Dell; Giovanni Pareschi, Editor(s)

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