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Proceedings Paper

Optical properties and residual stress of aluminum nitride films prepared by dual AC reactive magnetron sputtering
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Date Published:
Proc. SPIE 7409, Thin Film Solar Technology, ; doi: 10.1117/12.824232
Show Author Affiliations
Chien-Jen Tang, Ming Hsin Univ. of Science and Technology (Taiwan)
Cheng-Chung Jaing, Ming Hsin Univ. of Science and Technology (Taiwan)
Kun-Hsien Lee, National Central Univ. (Taiwan)
Chien-Cheng Kuo, National Central Univ. (Taiwan)
Cheng-Chung Lee, National Central Univ. (Taiwan)

Published in SPIE Proceedings Vol. 7409:
Thin Film Solar Technology
Alan E. Delahoy; Louay A. Eldada, Editor(s)

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