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Automated 3D-AFM as a key metrology technique for thin film head manufacturing and process development
Author(s): Andrew Lopez
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Date Published:
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Proc. SPIE 7378, Scanning Microscopy 2009, 73781H; doi: 10.1117/12.824208
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Andrew Lopez, Veeco Metrology Inc. (United States)


Published in SPIE Proceedings Vol. 7378:
Scanning Microscopy 2009
Michael T. Postek; Dale E. Newbury; S. Frank Platek; David C. Joy; Michael T. Postek; Dale E. Newbury; S. Frank Platek; David C. Joy; Michael T. Postek; Dale E. Newbury; S. Frank Platek; David C. Joy, Editor(s)

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