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Proceedings Paper

Preparation of titanium dioxide films by sol-gel route for gas sensors
Author(s): Vasilica Schiopu; Alina Matei; Ileana Cernica; Cecilia Podaru
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Paper Abstract

Semiconductor oxides such as SnO2, TiO2, WO3, ZnO2 etc. have been shown to be useful as gas sensor materials for monitoring various pollutant gases like H2S, NOx, NH3 etc. In this work, we would like to present the preparation of titanium dioxide films for gas sensor application, via the sol-gel technique. The coating solution was prepared by using titanium isopropoxide precursor, which was hydrolyzed with distilled water under the catalytic effect of different acids (HNO3, HCl or CH3COOH). Titanium dioxide films have been deposited using spin coating method and then synthesized at different temperatures. Fourier transform infrared spectroscopy observation has been used to analyze the sol-gel process. The morphology and the structure of the thin films were analyzed.

Paper Details

Date Published: 7 January 2009
PDF: 4 pages
Proc. SPIE 7297, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV, 72970M (7 January 2009); doi: 10.1117/12.823632
Show Author Affiliations
Vasilica Schiopu, National Institute for Research and Development in Microtechnologies (Romania)
Alina Matei, National Institute for Research and Development in Microtechnologies (Romania)
Ileana Cernica, National Institute for Research and Development in Microtechnologies (Romania)
Cecilia Podaru, National Institute for Research and Development in Microtechnologies (Romania)


Published in SPIE Proceedings Vol. 7297:
Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV
Paul Schiopu; Cornel Panait; George Caruntu; Adrian Manea, Editor(s)

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