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Proceedings Paper

Optical and structural properties of Sb and Sb-rich SiSb thin films
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Paper Abstract

Sb-rich SiSb thin film was recently reported as a promising phase change meromy material. In this paper, optical and structural properties of as-deposited amouphous and laser-annealed crystalline Sb-rich SiSb thin films are studied and compared with pure Sb thin film. Sb and Si15Sb85 thin films were deposited on polycarbonate substrates by magnetron sputtering. Laser initialization in pure Sb and Si15Sb85 thin films were performed with phase-change optical disc initializer. Reflectivity Spectrum and XRD analysis were performed on as-deposited and initialized Sb and Si15Sb85 thin films. The influence of Si doping on its optical and structural properties are discussed and qualitatively explained by a distorted structure model.

Paper Details

Date Published: 19 March 2009
PDF: 5 pages
Proc. SPIE 7125, Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage, 71251V (19 March 2009); doi: 10.1117/12.823427
Show Author Affiliations
Huan Huang, Shanghai Institute of Optics and Fine Mechanics (China)
Yang Wang, Shanghai Institute of Optics and Fine Mechanics (China)
Fuxi Gan, Shanghai Institute of Optics and Fine Mechanics (China)


Published in SPIE Proceedings Vol. 7125:
Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage
Fuxi Gan, Editor(s)

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