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Proceedings Paper

Fundamentals and application of materials integration for low-power piezoelectrically actuated ultra-nanocrystalline diamond MEMS/NEMS
Author(s): O. Auciello; S. Srinivasan; J. Hiller; A. V. Sumant; B. Kabius
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Paper Abstract

Most current micro/nanoelectromechanical systems (MEMS/NEMS) are based on silicon. However, silicon exhibits relatively poor mechanical/tribological properties, compromising applications to several projected MEMS/NEMS devices, particularly those that require materials with high Young's modulus for MEMS resonators or low surface adhesion forces for MEMS/NEMS working in conditions with extensive surface contact. Diamond films with superior mechanical/tribological properties provide an excellent alternative platform material. Ultrananocrystalline diamond (UNCD®) in film form with 2-5 nm grains exhibits excellent properties for high-performance MEMS/NEMS devices. Concurrently, piezoelectric Pb(ZrxTi1-x)O3 (PZT) films provide high sensitivity/low electrical noise for sensing/high-force actuation at relatively low voltages. Therefore, integration of PZT and UNCD films provides a high-performance platform for advanced MEMS/NEMS devices. This paper describes the bases of such integration and demonstration of low voltage piezoactuated hybrid PZT/UNCD cantilevers.

Paper Details

Date Published: 11 May 2009
PDF: 8 pages
Proc. SPIE 7318, Micro- and Nanotechnology Sensors, Systems, and Applications, 73181B (11 May 2009); doi: 10.1117/12.822798
Show Author Affiliations
O. Auciello, Argonne National Lab. (United States)
S. Srinivasan, Argonne National Lab. (United States)
J. Hiller, Argonne National Lab. (United States)
A. V. Sumant, Argonne National Lab. (United States)
B. Kabius, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 7318:
Micro- and Nanotechnology Sensors, Systems, and Applications
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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