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Proceedings Paper

Characterization of focused beam of desktop 10-Hz capillary-discharge 46.9-nm laser
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Paper Abstract

The desktop capillary-discharge Ne-like Ar laser (CDL) providing 10-μJ nanosecond pulses of coherent 46.9-nm radiation with a repetition rate up to 12 Hz was developed and built at the Colorado State University in Fort Collins and then installed in Prague. The beam of the laser was focused by a spherical mirror covered with Si/Sc multilayer coating onto the surface of poly(methyl methacrylate) - PMMA. Interaction parameters vary by changing the distance between sample surface and beam focus. The samples were exposed to various numbers of shots. Analysis of damaged PMMA by atomic force (AFM) and Nomarski (DIC - differential interference contrast) microscopes allows not only to determine the key characteristics of the focused beam (e.g. Rayleigh's parameter, focal spot diameter, tight focus position, etc.) but also to investigate mechanisms of the radiation-induced erosion processes.

Paper Details

Date Published: 18 May 2009
PDF: 8 pages
Proc. SPIE 7361, Damage to VUV, EUV, and X-Ray Optics II, 73610O (18 May 2009); doi: 10.1117/12.822759
Show Author Affiliations
Ludek Vyšin, Institute of Physics (Czech Republic)
Czech Technical Univ. in Prague (Czech Republic)
Tomás Burian, Institute of Physics (Czech Republic)
Czech Technical Univ. in Prague (Czech Republic)
Jaromír Chalupský, Institute of Physics (Czech Republic)
Czech Technical Univ. in Prague (Czech Republic)
Michael Grisham, Colorado State Univ., Ft. Collins (United States)
Vera Hájková, Institute of Physics (Czech Republic)
Scott Heinbuch, Colorado State Univ. (United States)
Krzysztof Jakubczak, Institute of Physics (Czech Republic)
Dale Martz, Colorado State Univ., Ft. Collins (United States)
Tomás Mocek, Institute of Physics (Czech Republic)
Peter Pira, Charles Univ. in Prague (Czech Republic)
Jirí Polan, Institute of Physics (Czech Republic)
Jorge J. Rocca, Colorado State Univ., Ft. Collins (United States)
Bedrich Rus, Institute of Physics (Czech Republic)
Jaroslav Sobota, Institute of Scientific Instruments (Czech Republic)
Libor Juha, Institute of Physics (Czech Republic)


Published in SPIE Proceedings Vol. 7361:
Damage to VUV, EUV, and X-Ray Optics II
Libor Juha; Saša Bajt; Ryszard Sobierajski, Editor(s)

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