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Proceedings Paper

Advances in 3D asphere testing and reconstruction
Author(s): Christof Pruss; Eugenio Garbusi; Wolfgang Osten
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Paper Abstract

One of the most challenging 3D metrology tasks in terms of required accuracy is the metrology of aspheric surfaces. Due to the required accuracies in the nanometer range, interferometry is one of the preferred methods. The reconstruction of the actual asphere shape from the measured phase data is presented for computer generated hologram approaches as well as for a new, flexible approach that was developed to avoid the use of null test configurations.

Paper Details

Date Published: 6 May 2009
PDF: 10 pages
Proc. SPIE 7329, Three-Dimensional Imaging, Visualization, and Display 2009, 732905 (6 May 2009); doi: 10.1117/12.822678
Show Author Affiliations
Christof Pruss, Univ. Stuttgart (Germany)
Eugenio Garbusi, Univ. Stuttgart (Germany)
Wolfgang Osten, Univ. Stuttgart (Germany)

Published in SPIE Proceedings Vol. 7329:
Three-Dimensional Imaging, Visualization, and Display 2009
Bahram Javidi; Jung-Young Son; Manuel Martinez-Corral; Fumio Okano; Wolfgang Osten, Editor(s)

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