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Proceedings Paper

Micro and nanophotonics in silicon: new perspectives and applications
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Paper Abstract

In the last few years, silicon photonics has been characterized by a wide range of applications in several fields, from communications to sensing, from biophotonics to the development of new artificial materials. In this communication, we report a review of the main results obtained in our laboratories in design, fabrication and characterization of new silicon-based optical structures and devices, including metamaterials, photodetectors, raman light amplifiers, and porous silicon based bio-chemical sensors and biochips. Future perspectives in integration of silicon based MEMS and MOEMS are also presented.

Paper Details

Date Published: 20 May 2009
PDF: 17 pages
Proc. SPIE 7366, Photonic Materials, Devices, and Applications III, 736606 (20 May 2009); doi: 10.1117/12.822676
Show Author Affiliations
Maurizio Casalino, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Giuseppe Coppola, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Principia Dardano, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Luca De Stefano, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Edoardo De Tommasi, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Antonella Ferrara, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Mariano Gioffrè, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Mario Iodice, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Vito Mocella, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Ilaria Rea, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Luigi Sirleto, Istituto per la Microelettronica e Microsistemi, CNR (Italy)
Ivo Rendina, Istituto per la Microelettronica e Microsistemi, CNR (Italy)


Published in SPIE Proceedings Vol. 7366:
Photonic Materials, Devices, and Applications III
Ali Serpenguzel; Gonçal Badenes; Giancarlo C. Righini, Editor(s)

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