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Proceedings Paper

Multifunctional automatic tester for optical storage and lithography
Author(s): Yongtao Fan; Wendong Xu; Chen Lu; Qian Liu; Chuanfei Guo
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Paper Abstract

Measurement technology plays an important role in the area of optical storage, a multifunctional quasi-dynamic static optical recording tester, which can also be used as nanometer laser direct writing lithography system, is designed and constructed for optical storage in this paper. The primary characteristics of the system are presented in detail, some experimental results are also given to show that the tester perform successfully, acting as a research platform for both optical storage and laser direct writing lithography.

Paper Details

Date Published: 19 March 2009
PDF: 5 pages
Proc. SPIE 7125, Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage, 712522 (19 March 2009); doi: 10.1117/12.822594
Show Author Affiliations
Yongtao Fan, Shanghai Institute of Optics and Fine Mechanics (China)
Wendong Xu, Shanghai Institute of Optics and Fine Mechanics (China)
Chen Lu, Shanghai Institute of Optics and Fine Mechanics (China)
Qian Liu, The National Ctr. for Nanoscience and Technology of China (China)
Chuanfei Guo, The National Ctr. for Nanoscience and Technology of China (China)


Published in SPIE Proceedings Vol. 7125:
Eighth International Symposium on Optical Storage and 2008 International Workshop on Information Data Storage

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