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Proceedings Paper

Influence of surface roughness on the measurement uncertainty of white-light interferometry
Author(s): Pavel Pavlíček
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Paper Abstract

White-light interferometry measuring on rough surface commonly does not resolve the lateral structure of the surface. Thus the height differences within one resolution cell of the imaging system can exceed one-fourth of the wavelength of the used light. Consequently the phase of the interferogram, which is recorded at the interferometer's output during the depth scan, becomes a random variable. In the image plane of the imaging system, a speckle pattern arises. Therefore in white-light interferometry on rough surface, the phase is not evaluated and the zero path difference is determined by seeking the maximal contrast of the interference fringes. Because of the rough surface, the measured value of the height coordinate is the result of a statistical process. In this way the rough surface gives rise to a measurement error. By means of numerical simulations we determine, how the surface roughness influences the measurement uncertainty of whitelight interferometry.

Paper Details

Date Published: 20 November 2008
PDF: 8 pages
Proc. SPIE 7141, 16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 71410R (20 November 2008); doi: 10.1117/12.822372
Show Author Affiliations
Pavel Pavlíček, Joint Lab. of Optics of Palacky Univ. Olomouc and Institute of Physics (Czech Republic)

Published in SPIE Proceedings Vol. 7141:
16th Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics
Agnieszka Popiolek-Masajada; Elzbieta Jankowska; Waclaw Urbanczyk, Editor(s)

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