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Proceedings Paper

Liquid metal collector optics for EUV lithography
Author(s): Kenneth M. Fahy; Paul Sheridan; Padraig A. Dunne; Patrick B. Hayden; Gerard D. O'Sullivan; Fergal O'Reilly
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Paper Details

Date Published:
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Proc. SPIE 7361, Damage to VUV, EUV, and X-Ray Optics II, ; doi: 10.1117/12.822314
Show Author Affiliations
Kenneth M. Fahy, Dublin City Univ. (Ireland)
Paul Sheridan, Dublin City Univ. (Ireland)
Padraig A. Dunne, Dublin City Univ. (Ireland)
Patrick B. Hayden, Dublin City Univ. (Ireland)
Gerard D. O'Sullivan, Dublin City Univ. (Ireland)
Fergal O'Reilly, Dublin City Univ. (Ireland)


Published in SPIE Proceedings Vol. 7361:
Damage to VUV, EUV, and X-Ray Optics II
Libor Juha; Saša Bajt; Ryszard Sobierajski, Editor(s)

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