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Proceedings Paper

Evaluation of a backside-illuminated ISIS
Author(s): H. D. Nguyen; C. Vo-Le; V. T. S. Dao; K. Takehara; T. G. Etoh; Y. Kondo; H. Maruno; H. Tominaga; H. Soya; H. van Kuijk; J. Bosiers; W. Klaassens; G. Ingram; S. Singh; M. Lesser
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Paper Abstract

This paper presents preliminary evaluation results of a test sensor of the backside-illuminated ISIS, an ultra-high sensitivity and ultra-high speed CCD image sensor. To achieve ultra-high sensitivity, the CCD image sensor employs the following three technologies: backside illumination, cooling and Charge Carrier Multiplication (CCM). The test sensor has been designed, fabricated and evaluated. At room temperature without cooling, the video camera has about ten-time higher sensitivity than the previous one, which was supported by a conventional front side illumination technology. Furthermore, the video camera can detect images at very low signal level, less than 5 e-, by using CCM at -40 degree C.

Paper Details

Date Published: 10 February 2009
PDF: 8 pages
Proc. SPIE 7126, 28th International Congress on High-Speed Imaging and Photonics, 712607 (10 February 2009); doi: 10.1117/12.821985
Show Author Affiliations
H. D. Nguyen, Kinki Univ. (Japan)
C. Vo-Le, Kinki Univ. (Japan)
V. T. S. Dao, Kinki Univ. (Japan)
K. Takehara, Kinki Univ. (Japan)
T. G. Etoh, Kinki Univ. (Japan)
Y. Kondo, Shimadzu Corp. (Japan)
H. Maruno, Shimadzu Corp. (Japan)
H. Tominaga, Shimadzu Corp. (Japan)
H. Soya, Shimadzu Corp. (Japan)
H. van Kuijk, DALSA Corp. (Netherlands)
J. Bosiers, DALSA Corp. (Netherlands)
W. Klaassens, DALSA Corp. (Netherlands)
G. Ingram, DALSA Corp. (Canada)
S. Singh, DALSA Corp. (Canada)
M. Lesser, Univ. of Arizona (United States)


Published in SPIE Proceedings Vol. 7126:
28th International Congress on High-Speed Imaging and Photonics
Harald Kleine; Martha Patricia Butron Guillen, Editor(s)

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