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Proceedings Paper

Advanced methods in scanning x-ray microscopy
Author(s): A. Menzel; M. Dierolf; C. M. Kewish; P. Thibault; K. Jefimovs; C. David; M. Bech; T. H. Jensen; R. Feidenhans'l; A.-M. Heegaard; R. Hansen; T. Berthing; K. L. Martinez; J. Als-Nielsen; S. Kapishnikov; L. Leiserowitz; F. Pfeiffer; O. Bunk
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Paper Abstract

New developments in X-ray instrumentation and analysis have facilitated the development and improvement of various scanning X-ray microscopy techniques. In this contribution, we offer an overview of recent scanning hard X-ray microscopy measurements performed at the Swiss Light Source. We discuss scanning transmission X-ray microscopy in its transmission, phase contrast, and dark-field imaging modalities. We demonstrate how small-angle X-ray scattering analysis techniques can be used to yield additional information. If the illumination is coherent, coherent diffraction imaging techniques can be brought to bear. We discuss how, from scanning microscopy measurements, detailed measurements of the X-ray scattering distributions can be used to extract high-resolution images. These microscopy techniques with their respective imaging power can easily be combined to multimodal X-ray microscopy.

Paper Details

Date Published: 22 May 2009
PDF: 9 pages
Proc. SPIE 7378, Scanning Microscopy 2009, 73780O (22 May 2009); doi: 10.1117/12.821823
Show Author Affiliations
A. Menzel, Paul Scherrer Institut (Switzerland)
M. Dierolf, Technische Univ. München (Germany)
C. M. Kewish, Paul Scherrer Institut (Switzerland)
P. Thibault, Paul Scherrer Institut (Switzerland)
K. Jefimovs, EMPA (Switzerland)
C. David, Paul Scherrer Institut (Switzerland)
M. Bech, Copenhagen Univ. (Denmark)
T. H. Jensen, Copenhagen Univ. (Denmark)
R. Feidenhans'l, Copenhagen Univ. (Denmark)
A.-M. Heegaard, Copenhagen Univ. (Denmark)
R. Hansen, Copenhagen Univ. (Denmark)
T. Berthing, Copenhagen Univ. (Denmark)
K. L. Martinez, Copenhagen Univ. (Denmark)
J. Als-Nielsen, Copenhagen Univ. (Denmark)
S. Kapishnikov, Weizmann Institute of Science (Israel)
L. Leiserowitz, Weizmann Institute of Science (Israel)
F. Pfeiffer, Technische Univ. München (Germany)
O. Bunk, Paul Scherrer Institut (Switzerland)

Published in SPIE Proceedings Vol. 7378:
Scanning Microscopy 2009
Michael T. Postek; Michael T. Postek; Michael T. Postek; Dale E. Newbury; Dale E. Newbury; Dale E. Newbury; S. Frank Platek; S. Frank Platek; S. Frank Platek; David C. Joy; David C. Joy; David C. Joy, Editor(s)

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