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Proceedings Paper

Identification of scanning probe microscopes sensor heads and validation of a mechanical model by a laser vibrometer
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Paper Abstract

In our contribution we present a technique for characterizing the piezo-driven sensor head of a scanning probe microscope (SPM) using a laser vibrometer. The experimental setup, the signal processing and some experimental results are described. Furthermore a mechanical model for the sensor head is proposed and verified by the experimental results. Finally a guidance for an online or offline correction of the position of the sensor head is presented.

Paper Details

Date Published: 22 May 2009
PDF: 9 pages
Proc. SPIE 7378, Scanning Microscopy 2009, 73781B (22 May 2009); doi: 10.1117/12.821781
Show Author Affiliations
Bernd R. Arminger, Johannes Kepler Univ. (Austria)
Bernhard G. Zagar, Johannes Kepler Univ. (Austria)

Published in SPIE Proceedings Vol. 7378:
Scanning Microscopy 2009
Michael T. Postek; Michael T. Postek; Michael T. Postek; Dale E. Newbury; Dale E. Newbury; Dale E. Newbury; S. Frank Platek; S. Frank Platek; S. Frank Platek; David C. Joy; David C. Joy; David C. Joy, Editor(s)

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