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Proceedings Paper

Russian standards for dimensional measurements for nanotechnologies
Author(s): V. P. Gavrilenko; M. N. Filippov; Yu. A. Novikov; A. V. Rakov; P. A. Todua
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Paper Abstract

In order to provide the uniformity of measurements at the nanoscale, seven national standards have been developed in the Russian Federation. Of these seven standards, three standards specify the procedures of fabrication and certification of linear measures with the linewidth lying in the nanometer range. The other four standards specify the procedures of verification and calibration of customer's atomic force microscopes and scanning electron microscopes, intended to perform measurements of linear dimensions of relief nanostructures. For an atomic force microscope, the following four parameters can be deduced: scale factor for the video signal, effective radius of the cantilever tip, scale factor for the vertical axis of the microscope, relative deflection of the microscope's Z-scanner from the orthogonality to the plane of a sample surface. For a scanning electron microscope, the following two parameters can be deduced: scale factor for the video signal and the effective diameter of the electron beam. The standards came into force in 2008.

Paper Details

Date Published: 22 May 2009
PDF: 8 pages
Proc. SPIE 7378, Scanning Microscopy 2009, 737812 (22 May 2009); doi: 10.1117/12.821760
Show Author Affiliations
V. P. Gavrilenko, Ctr. for Surface and Vacuum Research (Russian Federation)
M. N. Filippov, N. S. Kurnakov Institute of General and Inorganic Chemistry Institute (Russian Federation)
Yu. A. Novikov, A. M. Prokhorov General Physics Institute (Russian Federation)
A. V. Rakov, A. M. Prokhorov General Physics Institute (Russian Federation)
P. A. Todua, Ctr. for Surface and Vacuum Research (Russian Federation)


Published in SPIE Proceedings Vol. 7378:
Scanning Microscopy 2009
Michael T. Postek; Michael T. Postek; Michael T. Postek; Dale E. Newbury; Dale E. Newbury; Dale E. Newbury; S. Frank Platek; S. Frank Platek; S. Frank Platek; David C. Joy; David C. Joy; David C. Joy, Editor(s)

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