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Proceedings Paper

New transducer material concepts for biosensors and surface functionalization
Author(s): Anita Lloyd Spetz; Ruth Pearce; Linnea Hedin; Volodymyr Khranovskyy; Fredrik Söderlind; Per-Olov Käll; Rositza Yakimova; Kajsa Uvdal
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Paper Abstract

Wide bandgap materials like SiC, ZnO, AlN form a strong platform as transducers for biosensors realized as e.g. ISFET (ion selective field effect transistor) devices or resonators. We have taken two main steps towards a multifunctional biosensor transducer. First we have successfully functionalized ZnO and SiC surfaces with e.g. APTES. For example ZnO is interesting since it may be functionalized with biomolecules without any oxidation of the surface and several sensing principles are possible. Second, ISFET devises with a porous metal gate as a semi-reference electrode are being developed. Nitric oxide, NO, is a gas which participates in the metabolism. Resistivity changes in Ga doped ZnO was demonstrated as promising for NO sensing also in humid atmosphere, in order to simulate breath.

Paper Details

Date Published: 18 May 2009
PDF: 8 pages
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736206 (18 May 2009); doi: 10.1117/12.821662
Show Author Affiliations
Anita Lloyd Spetz, Linköping Univ. (Sweden)
Ruth Pearce, Linköping Univ. (Sweden)
Linnea Hedin, Linköping Univ. (Sweden)
Volodymyr Khranovskyy, Linköping Univ. (Sweden)
Fredrik Söderlind, Linköping Univ. (Sweden)
Per-Olov Käll, Linköping Univ. (Sweden)
Rositza Yakimova, Linköping Univ. (Sweden)
Kajsa Uvdal, Linköping Univ. (Sweden)


Published in SPIE Proceedings Vol. 7362:
Smart Sensors, Actuators, and MEMS IV
Ulrich Schmid, Editor(s)

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