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Proceedings Paper

Fabrication and characterization of yttria-stabilized zirconia membranes for micro solid oxide fuel cells
Author(s): Íñigo Garbayo; A. Tarancón; J. Santiso; A. Cavallaro; J. Roqueta; G. Garcia; I. Gràcia; C. Cané; N. Sabaté
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Paper Abstract

The present study is devoted to analyze the compatibility of yttria-stabilized zirconia thin films prepared by pulsed laser deposition technique for developing new silicon-based micro devices for micro solid oxide fuel cells applications. Yttriastabilized zirconia free-standing membranes with thicknesses from 60 to 240 nm and surface areas between 50x50 μm2 and 820x820 μm2 were fabricated on micromachined Si/SiO2/Si3N4 substrates. Deposition process was optimized for deposition temperatures from 200ºC to 800ºC. A complete mechanical study comprising thermomechanical stability, residual stress of the membranes and annealing treatment as well as a preliminary electrical characterization of ionic conductivity was performed in order to evaluate the best processing parameters for the yttria-stabilized zirconia membranes.

Paper Details

Date Published: 18 May 2009
PDF: 8 pages
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73621B (18 May 2009); doi: 10.1117/12.821613
Show Author Affiliations
Íñigo Garbayo, Ctr. Nacional de Microelectrónica, CSIC (Spain)
A. Tarancón, Ctr. Nacional de Microelectrónica, CSIC (Spain)
J. Santiso, CIN2, CSIC (Spain)
A. Cavallaro, CIN2, CSIC (Spain)
J. Roqueta, CIN2, CSIC (Spain)
G. Garcia, GFIM, Univ. Autònoma de Barcelona (Spain)
I. Gràcia, Ctr. Nacional de Microelectrónica, CSIC (Spain)
C. Cané, Ctr. Nacional de Microelectrónica, CSIC (Spain)
N. Sabaté, Ctr. Nacional de Microelectrónica, CSIC (Spain)


Published in SPIE Proceedings Vol. 7362:
Smart Sensors, Actuators, and MEMS IV
Ulrich Schmid, Editor(s)

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