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Proceedings Paper

Silicon comb-drive X-Y microstage with frame-in-the-frame architecture for MOEMS applications
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Paper Abstract

In this paper we present the silicon comb-drive X-Y microstage with the frame-in-the-frame architecture intended to be monolithically integrated with a glass microlens as a MOEMS 2D scanner for the Miniaturized Confocal Microscope On- Chip. The microstage is characterized by relatively large travel range (± 35 μm in X-direction and ± 28 μm in Y-direction at 100 V) for a small number of driving electrodes, without noticeable mechanical X-Y crosstalk. We describe the design, ANSYS modeling, fabrication process and static characterization of the device.

Paper Details

Date Published: 19 May 2009
PDF: 9 pages
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 736210 (19 May 2009); doi: 10.1117/12.821460
Show Author Affiliations
Karolina Laszczyk, FEMTO-ST, CNRS, Univ. de Franche-Comté (France)
Sylwester Bargiel, FEMTO-ST, CNRS, Univ. de Franche-Comté (France)
Jerzy Krężel, Warsaw Univ. of Technology (Poland)
Christophe Gorecki, FEMTO-ST, CNRS, Univ. de Franche-Comté (France)
Małgorzata Kujawińska, Warsaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 7362:
Smart Sensors, Actuators, and MEMS IV
Ulrich Schmid, Editor(s)

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