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Proceedings Paper

What happens turning a 250µm thin piezo-stack sideways? An experimental and analytical approach to one-side-actuated piezoelectric micro drives, regarding electrode layouts and directions of deflection
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Paper Abstract

This paper leads to a one-side-actuated piezoelectric membrane showing an upward deflection under forward bias. It is also shown that one-side-actuated piezoelectric membranes achieve comparable and higher deflections as common piezoelectric actuated membranes with similar dimensions. The piezoelectric substrate functions as complete active element, since it is both actuator and deflectable membrane, which offers an important simplification in the fabrication process.

Paper Details

Date Published: 18 May 2009
PDF: 8 pages
Proc. SPIE 7362, Smart Sensors, Actuators, and MEMS IV, 73620L (18 May 2009); doi: 10.1117/12.821320
Show Author Affiliations
Sandy Zähringer, Technische Univ. München (Germany)
Norbert Schwesinger, Technische Univ. München (Germany)


Published in SPIE Proceedings Vol. 7362:
Smart Sensors, Actuators, and MEMS IV
Ulrich Schmid, Editor(s)

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