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Proceedings Paper

Characterization of tin vapor from CO[sub]2[/sub] laser produced EUV light source
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Paper Abstract

We evaluated basic characteristics of energetic plasma ions and neutrals, and of low-energy fragments (e.g. evaporated material and liquid micro-droplets) from a Tin (Sn) plasma produced by a CO2 (10.6 m) or Nd:YAG (1064 nm) laser. Experiments were performed with free-standing liquid droplet, semi-fixed liquid droplet and fixed solid droplet targets. Characteristics of energetic plasma ions, neutrals and fragments were measured by Faraday Cups, laser-induced fluorescence (LIF) imaging and shadowgraph imaging, respectively. The Sn ions were emitted towards the laser incident direction with a velocity of 10 ~ 100 km/s (kinetic energy of 0.06 ~ 6 keV) and the fragments (the majority of the target material) ejected in the same direction as laser pulse at a velocity of 10 ~ 500m/s. The neutrals were emitted in all directions from the target with a velocity of 5 ~ 40 km/s (kinetic energy of 0.015 ~ 1 keV).

Paper Details

Date Published: 18 May 2009
PDF: 12 pages
Proc. SPIE 7361, Damage to VUV, EUV, and X-Ray Optics II, 73610X (18 May 2009); doi: 10.1117/12.820966
Show Author Affiliations
Yoshifumi Ueno, EUVA (Japan)
Tatsuya Yanagida, EUVA (Japan)
Takashi Suganuma, EUVA (Japan)
Hiroshi Komori, EUVA (Japan)
Akira Sumitani, EUVA (Japan)
Akira Endo, EUVA (Japan)


Published in SPIE Proceedings Vol. 7361:
Damage to VUV, EUV, and X-Ray Optics II
Libor Juha; Saša Bajt; Ryszard Sobierajski, Editor(s)

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