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Proceedings Paper

Fabrication of vertically standing metal nanowire arrays on silicon substrates using anodized aluminum oxide (AAO) and polycarbonate (PC) templates
Author(s): Seongjin Jang; Souran Manoochehri; Eui-Hyeok Yang
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Paper Abstract

We present a new fabrication method to grow vertically aligned nanowire arrays on a silicon substrate using commercially available anodized aluminum oxide (AAO) and polycarbonate (PC) templates. This technique eliminates the preparation procedure of coating one side of the template with a conductive layer, which is required in most template assisted nanowire growth methods. In this study, vertically aligned nanowires with a high aspect ratio of over 10 were fabricated on silicon substrate by electrodeposition, potentially enabling mass production.

Paper Details

Date Published: 12 May 2009
PDF: 4 pages
Proc. SPIE 7318, Micro- and Nanotechnology Sensors, Systems, and Applications, 73181K (12 May 2009); doi: 10.1117/12.820904
Show Author Affiliations
Seongjin Jang, Stevens Institute of Technology (United States)
Souran Manoochehri, Stevens Institute of Technology (United States)
Eui-Hyeok Yang, Stevens Institute of Technology (United States)


Published in SPIE Proceedings Vol. 7318:
Micro- and Nanotechnology Sensors, Systems, and Applications
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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