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Proceedings Paper

Characteristics of pure and Fe doped polycrystalline CeO2 using terahertz spectroscopy
Author(s): Qi-Ye Wen; Huai-Wu Zhang; Qing-Hui Yang; Sheng Li; Jie Zha; De-Gang Xu; Jian-Quan Yao
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Paper Abstract

Ferromagnetic high-k dielectrics are very promising candidates to replace SiO2 in silicon based microelectronics industry, and also could simultaneously enable semiconductor spintronic devices that harness polarized electrons. In present work, Fe doped CeO2 was synthesized by ceramic method and the effects of Fe doping on the structure and properties were characterized by ordinary methods and terahertz-time domain spectrometer (THz-TDS) technique. Our results show that the pure CeO2 only has a small dielectric constant (ε) of 4, while a small amount of Fe (0.9%) doping into CeO2 promotes the densification and induces a large ε of 23. From the THz spectroscopy, it is found that for undoped CeO2 both the power absorption and the index of refraction increase with frequency, while for Fe doped CeO2 we measure a remarkable transparency together with a flat index curve. The absorption coefficient of Fe doped CeO2 was less than 0.35 cm-1 ranging from 0.2 to 1.8 THz, rendering it a potential THz optical material. Our results also illustrate that THz technique is a powerful tool to differentiate the dielectric related electronic characteristics of high k materials.

Paper Details

Date Published: 16 February 2009
PDF: 13 pages
Proc. SPIE 7277, Photonics and Optoelectronics Meetings (POEM) 2008: Terahertz Science and Technology, 72770C (16 February 2009); doi: 10.1117/12.820520
Show Author Affiliations
Qi-Ye Wen, Univ. of Electronic Science and Technology of China (China)
Huai-Wu Zhang, Univ. of Electronic Science and Technology of China (China)
Qing-Hui Yang, Univ. of Electronic Science and Technology of China (China)
Sheng Li, Univ. of Electronic Science and Technology of China (China)
Jie Zha, Univ. of Electronic Science and Technology of China (China)
De-Gang Xu, Tianjin Univ. (China)
Jian-Quan Yao, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 7277:
Photonics and Optoelectronics Meetings (POEM) 2008: Terahertz Science and Technology
Jianquan Yao; Shenggang Liu; Xi-Cheng Zhang, Editor(s)

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