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Proceedings Paper

A self-mixing laser sensor for the real-time correction of straightness/flatness deviations of a linear slide
Author(s): Simona Ottonelli; Maurizio Dabbicco; Francesco De Lucia; Gaetano Scamarcio
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Paper Abstract

The development of a contactless sensor based on the Laser-Self-Mixing effect for the simultaneous measurement of linear and transverse degrees-of-freedom (DOFs) of a moving target is described in this paper. The sensor is made of three laser diodes with integrated monitor photodiodes, and a properly designed reflective target attached to the moving object. The proposed technique exploits the differential measurement of linear displacements by two identical self-mixing interferometers (SMIs) and makes the system more compact and easier to align with respect to traditional interferometric systems, thus providing an effective low-cost motion control system. The feasibility of the proposed sensor is experimentally demonstrated over a range of 1 m for linear motion and ± 6 mm for transverse displacements, with resolutions of 0.7 μm and 20 μm, respectively.

Paper Details

Date Published: 18 May 2009
PDF: 8 pages
Proc. SPIE 7356, Optical Sensors 2009, 73560Q (18 May 2009); doi: 10.1117/12.820438
Show Author Affiliations
Simona Ottonelli, CNR-INFM Lab. Regionale LIT3 (Italy)
Univ. degli Studi di Bari (Italy)
Maurizio Dabbicco, CNR-INFM Lab. Regionale LIT3 (Italy)
Univ. degli Studi di Bari (Italy)
Francesco De Lucia, CNR-INFM Lab. Regionale LIT3 (Italy)
Univ. degli Studi di Bari (Italy)
Gaetano Scamarcio, CNR-INFM Lab. Regionale LIT3 (Italy)
Univ. degli Studi di Bari (Italy)


Published in SPIE Proceedings Vol. 7356:
Optical Sensors 2009
Francesco Baldini; Jiri Homola; Robert A. Lieberman, Editor(s)

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