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Proceedings Paper

Spin coating and plasma process for 2.5D and hybrid 3D micro-resonators on multilayer polymers
Author(s): B. Bêche; E. Gaviot; C. Godet; A. Zebda; A. Potel; J. Barbe; L. Camberlein; V. Vié; P. Panizza; G. Loas; C. Hamel; J. Zyss; N. Huby
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Paper Abstract

We have designed and realized three integrated photonic families of micro-resonators (MR) on multilayer organic materials. Such so-called 2.5D-MR and 3D-MR structures show off radius values ranging from 40 to 200μm. Both first and second families are especially designed on organic multilayer materials and shaped as ring- and disk-MR organics structures arranged upon (and coupled with) a pair of SU8-organic waveguides. The third family is related to hybrid 3D-MR structures composed of spherical glass-MR coupled to organic waveguides by a Langmuir-Blodgett lipid film about three nanometers in thickness. At first, polymer spin coating, surface plasma treatment and selective UV-lithography processes have been developed to realize 2.5D photonic micro-resonators. Secondly, we have designed and characterized photonic-quadripoles made of 3D-glass-MR arranged upon a pair of SU8 waveguides. Such structures are defined by a 4-ports or 4-waveguides coupled by the spherical glass-MR. We have achieved an evanescent photonic coupling between the 3D-MR and the 4-ports structure. Spectral resonances have been measured for 4-whispering gallery-modes (WGM) into such 3D-structures respectively characterized by a 0.97 nm free spectral range (FSR) and a high quality Q-factor up to 4.104.

Paper Details

Date Published: 18 May 2009
PDF: 10 pages
Proc. SPIE 7356, Optical Sensors 2009, 735606 (18 May 2009); doi: 10.1117/12.820339
Show Author Affiliations
B. Bêche, Institut de Physique de Rennes, CNRS, Univ. de Rennes I (France)
E. Gaviot, Lab. d'Acoustique de l'Univ. du Maine, CNRS (France)
C. Godet, Institut de Physique de Rennes, CNRS, Univ. de Rennes I (France)
A. Zebda, Institut de Physique de Rennes, CNRS, Univ. de Rennes I (France)
A. Potel, Institut de Physique de Rennes, CNRS, Univ. de Rennes I (France)
J. Barbe, Institut de Physique de Rennes, CNRS, Univ. de Rennes I (France)
L. Camberlein, Lab. d'Acoustique de l'Univ. du Maine, CNRS (France)
V. Vié, Institut de Physique de Rennes, CNRS, Univ. de Rennes I (France)
P. Panizza, Institut de Physique de Rennes, CNRS, Univ. de Rennes I (France)
G. Loas, Institut de Physique de Rennes, CNRS, Univ. de Rennes I (France)
C. Hamel, Institut de Physique de Rennes, CNRS, Univ. de Rennes I (France)
J. Zyss, IFR d'Alembert, Lab. de Photonique Quantique et Moléculair, ENS Cachan, CNRS (France)
N. Huby, Institut de Physique de Rennes, CNRS, Univ. de Rennes I (France)


Published in SPIE Proceedings Vol. 7356:
Optical Sensors 2009
Francesco Baldini; Jiri Homola; Robert A. Lieberman, Editor(s)

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