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Proceedings Paper

New evaluation method of plane line profile error
Author(s): Yongguo Sun; Yongquan Sun; Jianying Guo
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Paper Abstract

Considering the measurement accuracy of the line profile error is affected because of the position error between the design benchmarks and measurement benchmarks during the measurement process, this paper brings forward a new method to calculate the plane line profile error precisely based on the complex figure optimization design. Use the indirect method of coordinate transformation to establish the objective function, and adopt complex figure algorithm and Newton-Iterative method to optimize fitting turning point, then to evaluate the plane line profile error precisely. Eliminate the effect of the position error betwe the design benchmarks and the measurement benchmarks by auto-spotting in the measurement process and ensure measurement accuracy. This method is highly feasible, precise and convenient to use.

Paper Details

Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71305F (31 December 2008); doi: 10.1117/12.819755
Show Author Affiliations
Yongguo Sun, Harbin Univ. of Science and Technology (China)
Yongquan Sun, Harbin Univ. of Science and Technology (China)
Jianying Guo, Harbin Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)

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