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Proceedings Paper

Computer aided alignment of 20X Schwarzschild projection optics
Author(s): Ke Liu; Yanqiu Li; Jingfeng Liu; Cuifang Kuang
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Paper Abstract

An effective computer aided alignment (CAA) scheme based on the singular value decomposition (SVD) of sensitivity matrix is used in the alignment of a set of 20X Schwarzschild projection optics. Alignment simulation is conducted by ray tracing software CODE V to verify the convergence of CAA method within the calculated tolerance limit. The result shows that, with the misalignment value calculated by CAA, fine alignment could be achieved after only one adjustment step. Alignment experiment is also performed according to the CAA scheme. After fine alignment, the measured wavefront error (WFE) is 18nm in rms, which is consistent with the CODE V simulation result in ideal alignment status.

Paper Details

Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713042 (31 December 2008); doi: 10.1117/12.819705
Show Author Affiliations
Ke Liu, Institute of Electrical Engineering (China)
Graduate School of the Chinese Academy of Sciences (China)
Yanqiu Li, Institute of Electrical Engineering (China)
Beijing Institute of Technology (China)
Jingfeng Liu, Institute of Electrical Engineering (China)
Graduate School of the Chinese Academy of Sciences (China)
Cuifang Kuang, Beijing Institute of Technology (China)


Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)

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