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Proceedings Paper

A system-level simulation of force-balance MEMS accelerometers by VHDL_AMS
Author(s): Xiaochuan Tang; Yufeng Zhang; Weiping Chen; Xiaowei Liu
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Paper Abstract

Micromachined accelerometers are one of the most widely used MEMS transducers. The theory of force-balance MEMS accelerometers is presented in the thesis. Meanwhile the paper accomplishes the system-level simulation and analysis of the force-balance MEMS accelerometer with different structure parameters. Based on the analysis, the conclusion is that the parameters of folded-spring (such as the length of the beam, the width of the beam) especially influence the output sensitivity.

Paper Details

Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300R (31 December 2008); doi: 10.1117/12.819564
Show Author Affiliations
Xiaochuan Tang, Harbin Institute of Technology (China)
Yufeng Zhang, Harbin Institute of Technology (China)
Weiping Chen, Harbin Institute of Technology (China)
Xiaowei Liu, Harbin Institute of Technology (China)


Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)

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