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Proceedings Paper

Mechanical properties investigation of PMMA, PC, and PS during thermal nanoimprinting
Author(s): Dan Xie; Honghai Zhang; Sheng Liu; Fulong Zhu; Sheng Tao
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Paper Abstract

PMMA(Polymethylmetacrylate), PC(Polycarbonate) and PS(Polystyrene) are the most frequently used polymer resist for thermal nanoimprint lithography (T-NIL), and moreover they are suitable for optical devices according to their well-known high transparency and excellent optical performance. In present research, thermal and mechanical properties of these three polymers were investigated with the home-made six-axis micro-tester. From the data of test, it is found that temperature, pressure and embossing time demonstrate crucial effect on imprinting process. Whereafter, nano-gratings of PMMA, PC and PS which were imprinted by the home-made NIL prototype show finer pattern fidelity, uniformity and demoulding quality. Consequently, we believe that PMMA, PS and PC possess great potential to be manufactured as polymer-based MEMS and MOEMS devices by nanoimprinting directly apart from being photoresists for thermal-nanoimprint.

Paper Details

Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 71300O (31 December 2008); doi: 10.1117/12.819561
Show Author Affiliations
Dan Xie, Huazhong Univ. of Science and Technology (China)
Wuhan National Lab. for Optoelectronics (China)
Honghai Zhang, Huazhong Univ. of Science and Technology (China)
Wuhan National Lab. for Optoelectronics (China)
Sheng Liu, Huazhong Univ. of Science and Technology (China)
Wuhan National Lab. for Optoelectronics (China)
Fulong Zhu, Huazhong Univ. of Science and Technology (China)
Wuhan National Lab. for Optoelectronics (China)
Sheng Tao, Huazhong Univ. of Science and Technology (China)
Wuhan National Lab. for Optoelectronics (China)


Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)

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