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Proceedings Paper

Optimum design of 2D micro-angle sensor
Author(s): Qinggang Liu; Heng Zhao; Xiaona Lou; Ningchuan Jiang; Xiaotang Hu
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Paper Abstract

To improve dynamic measurement performance and resolution, an optimum design on two-dimensional (2D) micro-angle sensor based on optical internal-reflection method via critical-angle refractive index measurement is presented in the paper. The noise signals were filtered effectively by modulating laser-driven and demodulating in signal proceeding. The system's accuracy and response speed are improved further by using 16-bit high-precision AD converter and MSP430 CPU which present with a high-speed performance during signals processes such as fitting angle-voltage curve through specific arithmetic, full range and zero point calibration, filter, scaling transformation etc. The experiment results indicated that, dynamic signal measurement range can be up to ±600arcsec, the measurement resolution can be better than 0.1arcsec, and the repeatability could be better than ±0.5arcsec.

Paper Details

Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713009 (31 December 2008); doi: 10.1117/12.819545
Show Author Affiliations
Qinggang Liu, Tianjin Univ. (China)
Heng Zhao, Tianjin Univ. (China)
Xiaona Lou, Tianjin Univ. (China)
Ningchuan Jiang, Tianjin Univ. (China)
Xiaotang Hu, Tianjin Univ. (China)


Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)

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