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Limits of precision measurements based on interferometers| Format | Member Price | Non-Member Price |
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Paper Abstract
Laser interferometric methods are employed in precision measurements and positioning tasks, since they provide the
means for attaining high metric resolution and precision, even over large measurement ranges. The most important
fundamental principles of heterodyne and homodyne interferometers are discussed. A metrological analysis makes it
possible to describe the advantages and limits of laser interferometry. The design and functionality of fibre-coupled
miniature interferometers are described. The broad applicability of interferometers to microtechnology, nanotechnology
and precision mechatronics is explained.
Paper Details
Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713002 (31 December 2008); doi: 10.1117/12.819537
Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713002 (31 December 2008); doi: 10.1117/12.819537
Show Author Affiliations
G. Jäger, Technical Univ. of Ilmenau (Germany)
Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)
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