Laser interferometric methods are employed in precision measurements and positioning tasks, since they provide the means for attaining high metric resolution and precision, even over large measurement ranges. The most important fundamental principles of heterodyne and homodyne interferometers are discussed. A metrological analysis makes it possible to describe the advantages and limits of laser interferometry. The design and functionality of fibre-coupled miniature interferometers are described. The broad applicability of interferometers to microtechnology, nanotechnology and precision mechatronics is explained.

Date Published: 31 December 2008
PDF: 6 pages
Proc. SPIE 7130, Fourth International Symposium on Precision Mechanical Measurements, 713002 (31 December 2008); doi: 10.1117/12.819537

Published in SPIE Proceedings Vol. 7130:
Fourth International Symposium on Precision Mechanical Measurements
Yetai Fei; Kuang-Chao Fan; Rongsheng Lu, Editor(s)