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Proceedings Paper

Swept laser interferometric interrogation
Author(s): Jeff Bush
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Paper Abstract

A high-speed, swept-laser interferometric interrogation approach is introduced. Dynamic measurements of weak Fabry-Perot or Fizeau type interferometers with gap ranges of 50 um to 1 mm up to 70 Ksamples per second are demonstrated and discussed. Displacement resolution is < 1 pm/rt-Hz. This has application with MEMS and FPPI type sensors.

Paper Details

Date Published: 27 April 2009
PDF: 7 pages
Proc. SPIE 7316, Fiber Optic Sensors and Applications VI, 73160S (27 April 2009); doi: 10.1117/12.819518
Show Author Affiliations
Jeff Bush, Optiphase, Inc. (United States)

Published in SPIE Proceedings Vol. 7316:
Fiber Optic Sensors and Applications VI
Eric Udd; Henry H. Du; Anbo Wang, Editor(s)

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