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Proceedings Paper

MEMS-based tunable filters for compact IR spectral imaging
Author(s): William Gunning; Stefan Lauxtermann; Hakan Durmas; Min Xu; Philip Stupar; Robert Borwick; Donald Cooper; Paul Kobrin; Miikka Kangas; Jeffrey DeNatale; William Tennant
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Paper Abstract

Arrays of independently tunable MEMS Fabry-Perot filters have been developed that enable spectral tuning over the range of 11 - 8 microns with a filter bandwidth of ~ 120 nm. Actuation is provided using a MEMS driver IC that is hybridized to the MEMS chip. Combining the filter array with an IR FPA enables spatially-resolved spectral tuning in a compact architecture. Tunable spectral response data from the first integrated tunable filter / FPA device are presented.

Paper Details

Date Published: 7 May 2009
PDF: 9 pages
Proc. SPIE 7298, Infrared Technology and Applications XXXV, 72982I (7 May 2009); doi: 10.1117/12.819017
Show Author Affiliations
William Gunning, Teledyne Scientific and Imaging, LLC (United States)
Stefan Lauxtermann, Teledyne Scientific and Imaging, LLC (United States)
Hakan Durmas, Teledyne Scientific and Imaging, LLC (United States)
Min Xu, Teledyne Scientific and Imaging, LLC (United States)
Philip Stupar, Teledyne Scientific and Imaging, LLC (United States)
Robert Borwick, Teledyne Scientific and Imaging, LLC (United States)
Donald Cooper, Teledyne Scientific and Imaging, LLC (United States)
Paul Kobrin, Teledyne Scientific and Imaging, LLC (United States)
Miikka Kangas, Teledyne Scientific and Imaging, LLC (United States)
Jeffrey DeNatale, Teledyne Scientific and Imaging, LLC (United States)
William Tennant, Teledyne Scientific and Imaging, LLC (United States)


Published in SPIE Proceedings Vol. 7298:
Infrared Technology and Applications XXXV
Bjørn F. Andresen; Gabor F. Fulop; Paul R. Norton, Editor(s)

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