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Proceedings Paper

Nanotube MEMS: modeling extreme nanoscale devices
Author(s): Slava V. Rotkin
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Paper Abstract

The physics of operation of nanotube NEMS devices is reviewed. Special attention is paid to non-classical effects, rarely described in MEMS analysis, such as van derWaals/Casimir interactions, quantum effects in electrostatics, atomistic parameterization of elasticity. As an example of a breakdown of a classical MEMS theory, the NEMS scaling limitation is derived in a lump model taking into account van der Waals/Casimir attraction.

Paper Details

Date Published: 11 May 2009
PDF: 13 pages
Proc. SPIE 7318, Micro- and Nanotechnology Sensors, Systems, and Applications, 731806 (11 May 2009); doi: 10.1117/12.818828
Show Author Affiliations
Slava V. Rotkin, Lehigh Univ. (United States)


Published in SPIE Proceedings Vol. 7318:
Micro- and Nanotechnology Sensors, Systems, and Applications
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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