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Proceedings Paper

A simple technique to increase the quality factor of micro-mechanical resonators
Author(s): Ross G. Turnbull; Mike C. L. Ward; Steve Collins; Carl J. Anthony
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Paper Abstract

When a micromechanical resonator is moving in air, resistance to motion causes damping which is proportional to the velocity of the resonator. This results in a low quality factor and reduces the sensitivity of the resonator and hence any sensor incorporating the resonator, to any environmental changes. In this paper, a method for increasing the quality factor of micromechanical resonant sensors using velocity feedback is reported. To achieve this, the feedthrough signal between drive and sense connections due to parasitic capacitance is first cancelled in order to remove the previously unreported, undesirable effects that occur from the combination of velocity feedback and capacitive feedthrough. Using this technique, the quality factor of a resonator in air is increased by over two orders of magnitude.

Paper Details

Date Published: 11 May 2009
PDF: 8 pages
Proc. SPIE 7318, Micro- and Nanotechnology Sensors, Systems, and Applications, 73181G (11 May 2009); doi: 10.1117/12.818673
Show Author Affiliations
Ross G. Turnbull, Univ. of Oxford (United Kingdom)
Mike C. L. Ward, Univ. of Birmingham (United Kingdom)
Steve Collins, Univ. of Oxford (United Kingdom)
Carl J. Anthony, Univ. of Birmingham (United Kingdom)


Published in SPIE Proceedings Vol. 7318:
Micro- and Nanotechnology Sensors, Systems, and Applications
Thomas George; M. Saif Islam; Achyut K. Dutta, Editor(s)

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