
Proceedings Paper
Improved MOEMS-based ultra-rapid Fourier transform infrared spectrometerFormat | Member Price | Non-Member Price |
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Paper Abstract
We present an improved FTIR spectrometer using a novel MOEMS actuator and discuss in detail the properties of the
MOEMS component and the resulting FT-IR sensor device. Spectral resolution and the spectral range allow making use
of the inherent multi-analyte detection capabilities giving the spectroscopy platform an advantage over singlewavelength
IR sensors. With its further miniaturization potential due to its MOEMS core, this compact, energy efficient
and robust spectrometer can thus act as transducer for portable and ultra-lightweight spectroscopic IR sensors, e.g. all
purpose hazardous vapor sensors, sensors for spaceborne and Micro-UAV based IR analysis, and many more.
Paper Details
Date Published: 29 April 2009
PDF: 11 pages
Proc. SPIE 7319, Next-Generation Spectroscopic Technologies II, 73190I (29 April 2009); doi: 10.1117/12.818646
Published in SPIE Proceedings Vol. 7319:
Next-Generation Spectroscopic Technologies II
Mark A. Druy; Christopher D. Brown; Richard A. Crocombe, Editor(s)
PDF: 11 pages
Proc. SPIE 7319, Next-Generation Spectroscopic Technologies II, 73190I (29 April 2009); doi: 10.1117/12.818646
Show Author Affiliations
A. Tortschanoff, Carinthian Tech Research AG (Austria)
A. Kenda, Carinthian Tech Research AG (Austria)
M. Kraft, Carinthian Tech Research AG (Austria)
A. Kenda, Carinthian Tech Research AG (Austria)
M. Kraft, Carinthian Tech Research AG (Austria)
T. Sandner, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
H. Schenk, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
W. Scherf, Carinthian Tech Research AG (Austria)
H. Schenk, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
W. Scherf, Carinthian Tech Research AG (Austria)
Published in SPIE Proceedings Vol. 7319:
Next-Generation Spectroscopic Technologies II
Mark A. Druy; Christopher D. Brown; Richard A. Crocombe, Editor(s)
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