We present an improved FTIR spectrometer using a novel MOEMS actuator and discuss in detail the properties of the MOEMS component and the resulting FT-IR sensor device. Spectral resolution and the spectral range allow making use of the inherent multi-analyte detection capabilities giving the spectroscopy platform an advantage over singlewavelength IR sensors. With its further miniaturization potential due to its MOEMS core, this compact, energy efficient and robust spectrometer can thus act as transducer for portable and ultra-lightweight spectroscopic IR sensors, e.g. all purpose hazardous vapor sensors, sensors for spaceborne and Micro-UAV based IR analysis, and many more.

Date Published: 29 April 2009
PDF: 11 pages
Proc. SPIE 7319, Next-Generation Spectroscopic Technologies II, 73190I (29 April 2009); doi: 10.1117/12.818646

Published in SPIE Proceedings Vol. 7319:
Next-Generation Spectroscopic Technologies II
Mark A. Druy; Christopher D. Brown; Richard A. Crocombe, Editor(s)