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Proceedings Paper

Diffractive MEMS components, systems, and applications
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Paper Abstract

A MEMS (micro electro mechanical system) technology has been used to produce scanning grating chips which have a tiltable plate with grating structures optimized for the 900nm ... 2500nm range as diffractive element. Based on these chips different spectrometers and a hyper spectral imager have been realized for NIR-spectroscopic applications like agricultural quality analysis, recycling and process control. Ongoing developments aim at the further reduction of size and effort. Chip scale or wafer scale packaging technologies could help to shrink the complete spectroscopic system. The integration of signal processing and evaluation routines opens new applications for a broad range of scientific and nonscientific users.

Paper Details

Date Published: 28 April 2009
PDF: 9 pages
Proc. SPIE 7319, Next-Generation Spectroscopic Technologies II, 73190G (28 April 2009); doi: 10.1117/12.818465
Show Author Affiliations
Heinrich Grüger, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Thomas Egloff, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Tino Pügner, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Michael Scholles, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Harald Schenk, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Hubert Lakner, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)


Published in SPIE Proceedings Vol. 7319:
Next-Generation Spectroscopic Technologies II
Mark A. Druy; Christopher D. Brown; Richard A. Crocombe, Editor(s)

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