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Proceedings Paper

Characterization of ZnO thin films grown on c-sapphire by pulsed laser deposition as templates for regrowth of ZnO by metal organic chemical vapor deposition
Author(s): David J. Rogers; F. Hosseini Teherani; C. Sartel; V. Sallet; F. Jomard; P. Galtier; M. Razeghi
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Paper Abstract

The use of ZnO template layers grown Pulsed Laser Deposition (PLD) has been seen to produce dramatic improvements in the surface morphology, crystallographic quality and optical properties of ZnO layers grown on c-sapphire substrates by Metal Organic Chemical Vapor Deposition. This paper provides complementary details on the PLD-grown ZnO template properties.

Paper Details

Date Published: 17 February 2009
PDF: 5 pages
Proc. SPIE 7217, Zinc Oxide Materials and Devices IV, 72170F (17 February 2009); doi: 10.1117/12.817032
Show Author Affiliations
David J. Rogers, Nanovation SARL (France)
F. Hosseini Teherani, Nanovation SARL (France)
C. Sartel, GEMAC, CNRS, Univ. de Versailles St. Quentin (France)
V. Sallet, GEMAC, CNRS, Univ. de Versailles St. Quentin (France)
F. Jomard, GEMAC, CNRS, Univ. de Versailles St. Quentin (France)
P. Galtier, GEMAC, CNRS, Univ. de Versailles St. Quentin (France)
M. Razeghi, Northwestern Univ. (United States)


Published in SPIE Proceedings Vol. 7217:
Zinc Oxide Materials and Devices IV
Ferechteh Hosseini Teherani; Cole W. Litton; David J. Rogers, Editor(s)

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