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Proceedings Paper

Laser-induced nanopatterning, ablation, and plasma spectroscopy in the near-field of an optical fiber tip
Author(s): Johannes Heitz; Sergey Yakunin; Thomas Stehrer; Gerard Wysocki; Dieter Bäuerle
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Paper Abstract

We combine laser processing and the technique of a scanning near-field optical microscope (SNOM) for realization of laser-patterning on a nanoscale, laser ablation near the fiber tip, and micro-analysis of solid surface samples by laserinduced breakdown spectroscopy (LIBS). We describe an universal SNOM-like setup allowing to produce near-field laser patterns by laser heating and laser ablation, laser-induced breakdown spectroscopy, and atomic force microscope (AFM) topography investigation with the same optical fiber tip, which is used as near-field emitter or as probe. With solid Si and Al samples, three laser processing regimes were observed with increasing laser pulse energy: (1) cone formation (only for Si, smallest features with 500 nm width and 100 nm height), (2) formation of small craters (smallest features with 450 nm width and 250 nm depth), and (3) crater formation with a width of more than 2 μm with emission of evaluable plasma emission line spectra.

Paper Details

Date Published: 22 April 2009
PDF: 8 pages
Proc. SPIE 7131, XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 71311W (22 April 2009); doi: 10.1117/12.816645
Show Author Affiliations
Johannes Heitz, Institute of Applied Physics (Austria)
Johannes Kepler Univ. Linz (Austria)
Sergey Yakunin, Institute of Applied Physics (Austria)
Thomas Stehrer, Institute of Applied Physics (Austria)
Johannes Kepler Univ. Linz (Austria)
Gerard Wysocki, Princeton Univ. (United States)
Dieter Bäuerle, Institute of Applied Physics (Austria)


Published in SPIE Proceedings Vol. 7131:
XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
Rui Vilar; Olinda Conde; Marta Fajardo; Luís O. Silva; Margarida Pires; Andrei Utkin, Editor(s)

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