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Proceedings Paper

Novel MWIR microspectrometer based on a tunable detector
Author(s): Norbert Neumann; Martin Ebermann; Steffen Kurth; Karla Hiller
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Paper Abstract

In this paper we present basic designs, operation concepts and some application examples of a novel microspectrometer for the spectral range of 3-5μm, which is based on a pyroelectric detector with an integrated micromachined Fabry-Perot filter (FPF). We discuss the influence of different optical setups on the spectral resolution and the signal-to-noise ratio of the microspectrometer. Two basic operation modes, step scan mode and continuous sweep mode are demonstrated. Such a device has a large potential in the field of infrared absorption spectroscopy, particularly if multicomponent mixtures have to be analyzed.

Paper Details

Date Published: 23 February 2009
PDF: 8 pages
Proc. SPIE 7208, MOEMS and Miniaturized Systems VIII, 72080D (23 February 2009); doi: 10.1117/12.816578
Show Author Affiliations
Norbert Neumann, InfraTec GmbH (Germany)
Martin Ebermann, InfraTec GmbH (Germany)
Steffen Kurth, Fraunhofer Research Institution for Electronic Nano Systems (Germany)
Karla Hiller, Chemnitz Univ. of Technology (Germany)


Published in SPIE Proceedings Vol. 7208:
MOEMS and Miniaturized Systems VIII
David L. Dickensheets; Harald Schenk; Wibool Piyawattanametha, Editor(s)

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