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Proceedings Paper

Advances in industrial high-power excimer laser technology
Author(s): Igor Bragin; Timur Misyuryaev; Andreas Targsdorf; Ingo Klaft; Ludolf Herbst; Wolfgang Zschocke; Kai Schmidt
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Paper Abstract

The paper presents a review of the most recent achievements in the development of the industrial high power excimer lasers. The results of the development of a XeCl laser with the output energy above 900mJ and the pulse repetition frequency up to 600Hz will be demonstrated. The system performance such as energy, stability, spatial and temporal properties of the laser pulse as well as the extended maintenance cycles and finally low cost of operation in industrial applications will be discussed. Special emphasis will be placed on the design of the laser chamber and the pulsed power module, enabling the generation of a reproducible and homogeneous gas discharges which is indispensable for the required laser performance over the whole range of the laser output power.

Paper Details

Date Published: 22 April 2009
PDF: 6 pages
Proc. SPIE 7131, XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers, 71311B (22 April 2009); doi: 10.1117/12.816554
Show Author Affiliations
Igor Bragin, Coherent GmbH (Germany)
Timur Misyuryaev, Coherent GmbH (Germany)
Andreas Targsdorf, Coherent GmbH (Germany)
Ingo Klaft, Coherent GmbH (Germany)
Ludolf Herbst, Coherent GmbH (Germany)
Wolfgang Zschocke, Coherent GmbH (Germany)
Kai Schmidt, Coherent GmbH (Germany)


Published in SPIE Proceedings Vol. 7131:
XVII International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers
Rui Vilar; Olinda Conde; Marta Fajardo; Luís O. Silva; Margarida Pires; Andrei Utkin, Editor(s)

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