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Proceedings Paper

Design and fabrication of inverted rib waveguide Bragg grating
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Paper Abstract

A polymeric SU8 rib waveguide Bragg grating filterfabricated using reactive ion etching (RIE) and solvent assisted microcontact molding (SAMIM) is presented. SAMIM is one kind of soft lithography. The technique is unique in which that a composite hPDMS/PDMS stamp was used to transfer the grating pattern onto an inverted SU8 rib waveguide system. The composite grating stamp can be used repeatedly several times with degradation. Using this stamp and inverter rib waveguide structure, the Bragg grating filter fabrication can be significantly simplified.

Paper Details

Date Published: 31 March 2009
PDF: 8 pages
Proc. SPIE 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009, 72910R (31 March 2009); doi: 10.1117/12.816543
Show Author Affiliations
Cheng-Sheng Huang, Univ. of Washington (United States)
Wei-Chih Wang, Univ. of Washington (United States)

Published in SPIE Proceedings Vol. 7291:
Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009
Vijay K. Varadan, Editor(s)

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