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Proceedings Paper

Multiply phase-shifted Fizeau interferometric sensor with a tunable laser diode
Author(s): Sayaka Idoi; Hayato Fujita; Masayuki Kagawa; Hideki Funamizu; Yukihiro Ishii
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Paper Abstract

With a newly-developed 16-sample wavelength-shifting algorithm, Fizeau phase-shifting interferometry with a laser diode (LD) suppresses alignment errors in a test plate. This phase-shifting algorithm includes the elimination of phase errors due to changes in laser power by LD currents. The measurement phase errors on a 16-sample phase-extraction algorithm are numerically and experimentally estimated. The surface-profile measurement of a plane-parallel plate is experimentally shown free from systematic errors.

Paper Details

Date Published: 2 February 2009
PDF: 9 pages
Proc. SPIE 7157, 2008 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications, 71571P (2 February 2009); doi: 10.1117/12.816124
Show Author Affiliations
Sayaka Idoi, Tokyo Univ. of Science (Japan)
Hayato Fujita, Tokyo Univ. of Science (Japan)
Masayuki Kagawa, Tokyo Univ. of Science (Japan)
Hideki Funamizu, Tokyo Univ. of Science (Japan)
Yukihiro Ishii, Tokyo Univ. of Science (Japan)


Published in SPIE Proceedings Vol. 7157:
2008 International Conference on Optical Instruments and Technology: Advanced Sensor Technologies and Applications
Anbo Wang; YanBiao Liao; AiGuo Song; Yukihiro Ishii; Xudong Fan, Editor(s)

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