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Proceedings Paper

Performance enhancement of IPMC by anisotropic plasma etching process
Author(s): Seok Hwan Lee; Chul-Jin Kim; Hyun-Woo Hwang; Sung-Joo Kim; Hyun-Seok Yang; No-Cheol Park; Young-Pil Park; Kang-Ho Park; Hyung-Kun Lee; Nak-Jin Choi
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Paper Abstract

Ionic Polymer-Metal Composites (IPMCs) of EAP actuators is famous for its good property of response and durability. The performance of Ionic Polymer-Metal Composites (IPMCs) is an important issue which is affected by many factors. There are two factors for deciding the performance of IPMC. By treating anisotropic plasma etching process to 6 models of the IPMCs, enhanced experimental displacement and force results are obtained. Plasma patterning processes are executed by changing the groove and the land length of 6 patterns. The purpose of the present investigation is to find out the major factor which mainly affects the IPMC performance. Simulations using ANSYS have been executed to compare with the experimental results about the values and the tendency of data. Experimental and simulating data of the performances seem to have similar tendency. In the next part of the paper, we observed the other properties like capacitance, resistance and stiffness of 6 plasma patterned IPMCs. And we observed that the stiffness is the major factor which affects the performance of IPMCs. As we seen, our problem has been reduced to investigate about the property of stiffness. We suggest that the stiffness is largely changed mainly because of the different thickness of Platinum stacked of the groove and the land part which are produced by anisotropic plasma etching processes. And we understand that anisotropic plasma patterned IPMCs of better performance can be applied to various applications.

Paper Details

Date Published: 6 April 2009
PDF: 8 pages
Proc. SPIE 7287, Electroactive Polymer Actuators and Devices (EAPAD) 2009, 728722 (6 April 2009); doi: 10.1117/12.815685
Show Author Affiliations
Seok Hwan Lee, Yonsei Univ. (Korea, Republic of)
Chul-Jin Kim, Yonsei Univ. (Korea, Republic of)
Hyun-Woo Hwang, Yonsei Univ. (Korea, Republic of)
Sung-Joo Kim, Yonsei Univ. (Korea, Republic of)
Hyun-Seok Yang, Yonsei Univ. (Korea, Republic of)
No-Cheol Park, Yonsei Univ. (Korea, Republic of)
Young-Pil Park, Yonsei Univ. (Korea, Republic of)
Kang-Ho Park, Electronics and Telecommunications Research Institute (Korea, Republic of)
Hyung-Kun Lee, Electronics and Telecommunications Research Institute (Korea, Republic of)
Nak-Jin Choi, Electronics and Telecommunications Research Institute (Korea, Republic of)


Published in SPIE Proceedings Vol. 7287:
Electroactive Polymer Actuators and Devices (EAPAD) 2009
Yoseph Bar-Cohen; Thomas Wallmersperger, Editor(s)

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