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Proceedings Paper

Surface acoustic wave (SAW) device using piezoelectric cellulose EAPap: fabrication and characterization
Author(s): Joo-Hyung Kim; Gyu-Young Yun; Sang-Dong Jang; Min-Hee Lee; Jaehwan Kim
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Paper Abstract

Novel smart materials have been suggested for various sensor applications such as chemical sensor, bio sensor, wireless communication, and radio frequency identification (RF-ID) devices. It was reported that bio-compatible and as well as bio-degradable, naturally abundant, and flexible piezoelectric cellulose electro-active paper (EAPap) had a great industrial potential due to its piezoelectricity. Here we studied the feasibility of surface acoustic wave (SAW) devices using thin piezoelectric cellulose EAPap. The single inter-digit transducer (IDT) pattern with 10 μm finger width was designed and fabricated on thin piezoelectric EAPap using lift-off technique. The frequency response to different vapor dose of isopropyl alcohol under will be presented.

Paper Details

Date Published: 31 March 2009
PDF: 7 pages
Proc. SPIE 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009, 72910W (31 March 2009); doi: 10.1117/12.815591
Show Author Affiliations
Joo-Hyung Kim, Inha Univ. (Korea, Republic of)
Gyu-Young Yun, Inha Univ. (Korea, Republic of)
Sang-Dong Jang, Inha Univ. (Korea, Republic of)
Min-Hee Lee, Inha Univ. (Korea, Republic of)
Jaehwan Kim, Inha Univ. (Korea, Republic of)

Published in SPIE Proceedings Vol. 7291:
Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009
Vijay K. Varadan, Editor(s)

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